Adsorbed Oxygen Ions and Oxygen Vacancies: Their Concentration and Distribution in Metal Oxide Chemical Sensors and Influencing Role in Sensitivity and Sensing Mechanisms
Abstract
:1. Introduction
2. Overview of Adsorbed Oxygen from the Viewpoint of Gas Sensor Designer
3. Review of Analytical-Spectral-Microscopic Tools for Semiconducting Metal Oxides (SMOs), Adsorbed-Chemisorbed Oxygen, and Chemical Gas Sensors Analysis
The Concerns with XPS Analysis of Chemisorbed-Adsorbed Oxygen Ions on SMOs’ Surfaces
4. Experimental
5. Investigation of Adsorbed Oxygen Ions, Surface Chemistry-Homogeneity, and Work Function (Φ) of Semiconducting Metal Oxides (SMOs)
5.1. Surface Topography of WO3 through LEEM
5.2. Map** Oxidation State Homogeneity on the WO3 Surface via XPEEM
5.3. Work Function (Φ) Measurements
5.4. Amount of Adsorbed Oxygen Species on WO3 Sensor Surface
6. H2 Sensor Testing at 250 °C
7. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Acknowledgments
Conflicts of Interest
Abbreviations
EXAFS | Extended X-Ray Absorption Fine Structure |
SEXAFS | Surface Extended X-Ray Absorption Fine Structure |
NEXAFS: | Near Edge X-Ray Absorption Fine Structure |
XPS | X-Ray Photoelectron Spectroscopy |
NAP-XPS | Near Ambient Pressure X-Ray Photoelectron Spectroscopy |
UPS | Ultraviolet Photoelectron Spectroscopy |
LEED | Low-Energy Electron Diffraction |
AES | Auger Electron Spectroscopy |
HR/-EELS | High-Resolution/Electron Energy-Loss Spectroscopy |
ISS/RBS | Ion Scattering-Rutherford Backscattering Spectroscopy |
FT-IR and Raman | Fourier Transform Infrared and Raman Spectroscopy |
NMR | Nuclear Magnetic Resonance |
LEEM | Low-Energy Electron Microscopy |
XPEEM | X-ray photoemission electron Microscopy |
UV-VIS | Ultraviolet–Visible Light Spectroscopy |
CL/PL | Cathodoluminescence-Photoluminescence |
XRF | X-Ray Fluorescence |
EDS | Energy-Dispersive X-Ray Spectroscopy |
SEM | Scanning Electron Microscopy |
(GI)-XRD | (Grazing Incidence-) X-Ray Diffraction |
TP(X) | Temperature Programmed (X:Reduction-Oxidation) |
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Technique | Elemental Identification | Chemical State | Structure | Surface Defects | Bulk Defects | Morphology | Imaging | Depth Probed (nm) | Lateral Resolution (µm) | Quantification | In-Situ Applicability | Chemical State Map** | Elemental Map** | Electronic Properties |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
(GI-)XRD | ✓/X | ✓/X | ✓ | ✓(GI) | ✓ | X | ✓ | 10-Bulk | ≥10000 | ✓ | ✓ | ✓/X | ✓/X | X |
EXAFS | ✓ | X | ✓ | X | X | X | X | ≥1000 | >1000 | ✓/X | ✓ | X | X | ✓ |
SEXAFS | ✓ | X | ✓ | X | X | X | X | 1–10 | >1000 | ✓/X | ✓ | X | X | ✓ |
NEXAFS | ✓ | ✓/X | ✓ | X | X | X | X | 1–10 | >1000 | ✓/X | ✓ | X | X | ✓ |
XPS | ✓ | ✓ | X | ✓ | ✓* | X | ✓ | 0.5–10 | 50–100 | ✓ | ✓ | ✓ | ✓ | ✓ |
NAP-XPS | ✓ | ✓ | X | ✓ | ✓* | X | ✓ | 0.5–10 | 50–100 | ✓ | ✓ | ✓ | ✓ | ✓ |
UPS | X | ✓ | X | ✓ | X | X | X | 0.5–5 | 150 | ✓ | X | X | X | ✓ |
LEED | X | X | ✓ | ✓ | X | X | ✓ | 1–5 | <0.1 | X | ✓ | X | X | X |
AES | ✓ | ✓/X | X | ✓ | ✓* | X | ✓ | 0.5–10 | <0.1 | X | ✓ | X | ✓ | X |
ISS/RBS | ✓ | ✓/X | ✓ | X | X | X | X | 0.3–3 | 150 | ✓ | X | X | X | X |
FT-IR | ✓ | ✓/X | X | X | ✓ | X | ✓ | ≥1000 | ≥5000 | ✓/X | ✓ | X | X | X |
Raman | ✓ | ✓/X | ✓ | X | ✓ | X | ✓ | ≥1000 | 1–10 | ✓/X | ✓ | X | X | X |
NMR | X | ✓ | ✓ | X | ✓ | X | X | >104 | >1000 | ✓ | ✓ | X | X | X |
LEEM | X | X | X | X | X | ✓ | ✓ | 1–3 | >1000 | X | X | X | X | ✓/X |
XPEEM | ✓ | ✓ | X | ✓ | ✓* | ✓ | ✓ | 1–10 | <0.1 | ✓ | ✓ | ✓ | ✓ | ✓ |
UV-VIS | X | X | X | X | ✓ | X | X | ~1000 | 5–100 | ✓ | X | X | X | ✓ |
CL/PL | X | ✓ | X | ✓/X | ✓ | X | ✓ | 10–1000 | ≥1 | ✓/X | X/✓ | ✓ | X | ✓ |
XRF | ✓ | X | X | X | X | X | ✓ | ≥1000 | 1000 | ✓ | ✓ | X | ✓ | X |
EDS-SEM | ✓ | X | X | X | X | ✓ | ✓ | >100 | 0.5 | ✓ | ✓/X | X | ✓ | X |
H/R-EELS | ✓ | ✓ | X | ✓ | X | X | X | 2–20 | <0.1 | ✓/X | ✓/X | X | ✓/X | ✓ |
TP(X) | X | ✓/X | X | ✓ | X | X | X | >104 | >1000 | ✓ | ✓ | X | X | X |
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Ciftyurek, E.; Li, Z.; Schierbaum, K. Adsorbed Oxygen Ions and Oxygen Vacancies: Their Concentration and Distribution in Metal Oxide Chemical Sensors and Influencing Role in Sensitivity and Sensing Mechanisms. Sensors 2023, 23, 29. https://doi.org/10.3390/s23010029
Ciftyurek E, Li Z, Schierbaum K. Adsorbed Oxygen Ions and Oxygen Vacancies: Their Concentration and Distribution in Metal Oxide Chemical Sensors and Influencing Role in Sensitivity and Sensing Mechanisms. Sensors. 2023; 23(1):29. https://doi.org/10.3390/s23010029
Chicago/Turabian StyleCiftyurek, Engin, Zheshen Li, and Klaus Schierbaum. 2023. "Adsorbed Oxygen Ions and Oxygen Vacancies: Their Concentration and Distribution in Metal Oxide Chemical Sensors and Influencing Role in Sensitivity and Sensing Mechanisms" Sensors 23, no. 1: 29. https://doi.org/10.3390/s23010029