Mathematical Physics Analysis of Nozzle Sha** at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)
Abstract
:1. Introduction
2. Methodology
2.1. Experimental Measuring
2.2. Analyzed Variants
2.2.1. Calculated Cross-Section Variant
2.2.2. Under-Expanded Variant
2.2.3. OPEN TOTAL Variant
2.2.4. OPEN Variant
2.2.5. Angle 45° Variant
2.3. Tuning of Calculations in Ansys Fluent System
3. Results
Evaluation of Electron Dispersion for Each Variant
- M < 0.05: there is a minimum beam dispersion of up to 5%;
- M = 0.05–3: there is partial dispersion in the range of 5–95%;
- M > 3: there is complete dispersion above 95%.
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
Appendix A
References
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Pfeiffer CMR 361 | Pfeiffer CMR 362 | |
---|---|---|
Measuring range [Pa] | 10–11,000 | 10–110 |
Precision: % of measurement [%] | 0.2 | 0.2 |
Pressure max. [hPa] | 3000 | 2000 |
Response time [ms] | 30 | 30 |
Pressure [Pa] | |
---|---|
Specimen Chamber | Differentially Pumped Chamber |
p0 | pv |
50 | 1.25 |
100 | 2.20 |
200 | 3.80 |
300 | 5.20 |
400 | 6.70 |
500 | 8.10 |
600 | 9.40 |
700 | 10.80 |
800 | 12.10 |
900 | 13.40 |
1000 | 14.70 |
1100 | 15.90 |
1200 | 17.10 |
1300 | 18.30 |
1400 | 19.50 |
1500 | 20.75 |
1600 | 22.10 |
1700 | 23.20 |
1800 | 24.30 |
1900 | 25.20 |
2000 | 26.00 |
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Maxa, J.; Neděla, V.; Šabacká, P.; Binar, T. Mathematical Physics Analysis of Nozzle Sha** at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM). Sensors 2024, 24, 3243. https://doi.org/10.3390/s24103243
Maxa J, Neděla V, Šabacká P, Binar T. Mathematical Physics Analysis of Nozzle Sha** at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM). Sensors. 2024; 24(10):3243. https://doi.org/10.3390/s24103243
Chicago/Turabian StyleMaxa, Jiří, Vilém Neděla, Pavla Šabacká, and Tomáš Binar. 2024. "Mathematical Physics Analysis of Nozzle Sha** at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)" Sensors 24, no. 10: 3243. https://doi.org/10.3390/s24103243