Study on Microstructure and Tribological Mechanism of Mo Incorporated (AlCrTiZr)N High-Entropy Ceramics Coatings Prepared by Magnetron Sputtering
Abstract
:1. Introduction
2. Experimental
2.1. Deposition of Coatings
2.2. Microstructure Characterization
2.3. Mechanical and Tribological Tests
3. Results and Discussion
3.1. Microstructures
3.2. Mechanical Properties
3.3. Friction and Wear Properties
3.3.1. Friction Coefficient and Wear Rate
3.3.2. Wear Track Morphologies
4. Tribological Mechanism
4.1. Element Analysis of Wear Track
4.2. Wear Mechanism
5. Conclusions
- GIXRD results show that the prepared coatings are all solid solution structures. With the addition of the Mo element, the crystallinity increases and the preferred orientation of the coating changes from (111) to (200). In addition, the coating with the (111) preferred orientation presents higher roughness.
- Hard yet tough high-entropy ceramics coatings (TiZrAlCrMox)N can be obtained by magnetron sputtering, with a hardness of 30.24 GPa, and toughness (no obvious propagation cracks appear).
- The coatings with Mo show excellent tribological properties compared to those without Mo: the friction coefficient reduces to 1/3 (from 0.72 to 0.26) and the wear rate reduces to 1/10 (from 3.39 × 10−5 to 3.15 × 10−6 mm3/(N·m)).
- The low friction coefficient results from the formation of layered MoO2 which reduces the shear force, and the low wear rate results from both the high hardness and toughness.
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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DC Power of Target (W) | Deposition Time | RF Bias Power (W) | N2 Flow Rate (sccm) | Ar Flow Rate (sccm) | ||
---|---|---|---|---|---|---|
TiZr 200 | AlCr 150 | Mo 0/30/50/100 | 240/230 /210/190 | 30 | 12 | 40 |
Mo Content | d (nm) | a (Å) | H (GPa) | E (GPa) | H/E | H3/E2 (GPa) | μ | Wr (mm3/(N•m)) |
---|---|---|---|---|---|---|---|---|
0 at.% | 6.5 | 4.2849 | 24.39 | 317.91 | 0.077 | 0.144 | 0.72 | 3.39 × 10−5 |
6.26 at.% | 7.1 | 4.3022 | 24.44 | 303.56 | 0.081 | 0.158 | 0.35 | 5.78 × 10−6 |
12.32 at.% | 6.3 | 4.3138 | 30.24 | 327.83 | 0.092 | 0.257 | 0.26 | 3.15 × 10−6 |
20.54 at.% | 5.8 | 4.3010 | 26.41 | 315.76 | 0.084 | 0.185 | 0.38 | 6.18 × 10−6 |
(TiZrAlCrMox)N | Ti (at.%) | Zr (at.%) | Al (at.%) | Cr (at.%) | Mo (at.%) | |
---|---|---|---|---|---|---|
Ti-N-O | Ti-O | Zr-O | Al-O | Cr-O | Mo-O | |
0 at.% Mo-pre | 22.64 | 16.15 | 53.1 | 46.34 | 45.73 | |
0 at.% Mo-post | 31.74 | 18.56 | 45.48 | 55.48 | 53.23 | |
12.32 at.% Mo-pre | 19.78 | 18.49 | 50.01 | 39.84 | 50.93 | 28.10 |
12.32 at.% Mo-post | 28.48 | 21.35 | 49.99 | 67.45 | 57.39 | 41.59 |
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Zheng, J.; Zhao, Y.; Li, J.; Zhang, S.; Zhang, J.; Sun, D. Study on Microstructure and Tribological Mechanism of Mo Incorporated (AlCrTiZr)N High-Entropy Ceramics Coatings Prepared by Magnetron Sputtering. Nanomaterials 2024, 14, 814. https://doi.org/10.3390/nano14100814
Zheng J, Zhao Y, Li J, Zhang S, Zhang J, Sun D. Study on Microstructure and Tribological Mechanism of Mo Incorporated (AlCrTiZr)N High-Entropy Ceramics Coatings Prepared by Magnetron Sputtering. Nanomaterials. 2024; 14(10):814. https://doi.org/10.3390/nano14100814
Chicago/Turabian StyleZheng, Jia, Yiman Zhao, **gchuan Li, Sam Zhang, Jian Zhang, and Deen Sun. 2024. "Study on Microstructure and Tribological Mechanism of Mo Incorporated (AlCrTiZr)N High-Entropy Ceramics Coatings Prepared by Magnetron Sputtering" Nanomaterials 14, no. 10: 814. https://doi.org/10.3390/nano14100814